JPH0581489B2 - - Google Patents

Info

Publication number
JPH0581489B2
JPH0581489B2 JP60056291A JP5629185A JPH0581489B2 JP H0581489 B2 JPH0581489 B2 JP H0581489B2 JP 60056291 A JP60056291 A JP 60056291A JP 5629185 A JP5629185 A JP 5629185A JP H0581489 B2 JPH0581489 B2 JP H0581489B2
Authority
JP
Japan
Prior art keywords
electromagnet
top plate
gas chamber
electromagnets
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP60056291A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61217434A (ja
Inventor
Seiji Ishikawa
Hiroshi Hashimoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Chemical Corp
Original Assignee
Mitsubishi Chemical Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Chemical Industries Ltd filed Critical Mitsubishi Chemical Industries Ltd
Priority to JP5629185A priority Critical patent/JPS61217434A/ja
Priority to GB08524359A priority patent/GB2165515A/en
Priority to DE19853536151 priority patent/DE3536151A1/de
Publication of JPS61217434A publication Critical patent/JPS61217434A/ja
Publication of JPH0581489B2 publication Critical patent/JPH0581489B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Non-Mechanical Conveyors (AREA)
  • Automatic Analysis And Handling Materials Therefor (AREA)
JP5629185A 1984-10-12 1985-03-20 搬送用装置 Granted JPS61217434A (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP5629185A JPS61217434A (ja) 1985-03-20 1985-03-20 搬送用装置
GB08524359A GB2165515A (en) 1984-10-12 1985-10-02 Conveyor
DE19853536151 DE3536151A1 (de) 1984-10-12 1985-10-10 Halterung

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5629185A JPS61217434A (ja) 1985-03-20 1985-03-20 搬送用装置

Publications (2)

Publication Number Publication Date
JPS61217434A JPS61217434A (ja) 1986-09-27
JPH0581489B2 true JPH0581489B2 (en]) 1993-11-15

Family

ID=13022996

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5629185A Granted JPS61217434A (ja) 1984-10-12 1985-03-20 搬送用装置

Country Status (1)

Country Link
JP (1) JPS61217434A (en])

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JP2581066B2 (ja) * 1987-03-31 1997-02-12 富士通株式会社 ウエ−ハ搬送方法及び装置
JP4735258B2 (ja) 2003-04-09 2011-07-27 株式会社ニコン 露光方法及び装置、並びにデバイス製造方法
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JP5267029B2 (ja) 2007-10-12 2013-08-21 株式会社ニコン 照明光学装置、露光装置及びデバイスの製造方法
US8379187B2 (en) 2007-10-24 2013-02-19 Nikon Corporation Optical unit, illumination optical apparatus, exposure apparatus, and device manufacturing method
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US9952242B2 (en) 2014-09-12 2018-04-24 Roche Diagnostics Operations, Inc. Laboratory sample distribution system and laboratory automation system
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EP3153866A1 (en) 2015-10-06 2017-04-12 Roche Diagnostics GmbH Method of determining a handover position and laboratory automation system
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EP3211429A1 (en) 2016-02-26 2017-08-30 Roche Diagnostics GmbH Transport device having a tiled driving surface
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CN109196363A (zh) 2016-06-03 2019-01-11 豪夫迈·罗氏有限公司 实验室样品分配系统和实验室自动化系统
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EP3260867A1 (en) 2016-06-21 2017-12-27 Roche Diagnostics GmbH Method of setting a handover position and laboratory automation system
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EP3330717B1 (en) 2016-12-01 2022-04-06 Roche Diagnostics GmbH Laboratory sample distribution system and laboratory automation system
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JP7300281B2 (ja) * 2019-03-08 2023-06-29 株式会社日立ハイテク 搬送装置、およびそれを備えた検体分析システム、検体前処理装置、ならびに被搬送体の搬送方法
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DE102020120295A1 (de) 2020-07-31 2022-02-03 Krones Aktiengesellschaft Vorrichtung zum Ausstatten von Behältern
JP7545260B2 (ja) * 2020-08-13 2024-09-04 株式会社日立ハイテク 検体搬送装置、検体分析システムおよび検体前処理装置
EP4001923B1 (en) * 2020-11-23 2024-06-05 Roche Diagnostics GmbH Laboratory sample distribution system and laboratory automation system
US11747356B2 (en) 2020-12-21 2023-09-05 Roche Diagnostics Operations, Inc. Support element for a modular transport plane, modular transport plane, and laboratory distribution system
JP7422652B2 (ja) * 2020-12-24 2024-01-26 株式会社日立ハイテク 検体搬送装置
WO2022208988A1 (ja) * 2021-03-29 2022-10-06 株式会社日立ハイテク 検体検査システム、及び搬送方法

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5124710A (en]) * 1974-08-23 1976-02-28 Tokyo Shibaura Electric Co
SE7607496L (sv) * 1976-07-01 1978-01-02 Astra Laekemedel Ab Sett for bekempning av virusinfektioner
JPS5742424A (en) * 1980-08-28 1982-03-10 Nec Home Electronics Ltd Transport apparatus for axial lead-out lead parts
JPS5817018A (ja) * 1981-07-16 1983-02-01 Nippon Telegr & Teleph Corp <Ntt> ウエハ移送装置
JPS58117421U (ja) * 1982-02-04 1983-08-10 日立機電工業株式会社 板状体の搬送装置
JPS6194925A (ja) * 1984-10-12 1986-05-13 Mitsubishi Chem Ind Ltd 搬送用装置

Also Published As

Publication number Publication date
JPS61217434A (ja) 1986-09-27

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Legal Events

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LAPS Cancellation because of no payment of annual fees